Advanced Process Trouble-Shooting
For Plasma Etchers
A full-day presentation using dozens of real-world examples of troubleshooting problems on many different tools to help teach you the insights that can take years to learn on the job ... and some other tips that you might never suspect!
You will see your effectiveness increase right along with uptime after participating in this seminar.
WHAT YOU WILL LEARN
• How to let the wafer lead you to the machine malfunction
• The big knobs - process parameters that most strongly effect the wafer
• Special issues about each thin film being etched - a must!
• A special problem solving method just for etchers
• Diagnostic matrices - what can they tell you?
• Experimental design for troubleshooting - get to the root cause
• Special approaches for new machine startups
COURSE CONTENTS
• Objectives: what do you want to accomplish?
• Follow the trail: relationships between process outputs and variables
• A specialized problem solving method developed for etchers
• Diagnostic matrices
• Special thin-film and etch application issues
• Exercises: real case histories from many different machines
WHO SHOULD ATTEND
• Process engineers and technicians
• Maintenance / Service engineers and technicians
SEMINAR COST
Advanced Trouble Shooting Cost is $4,500 for 15 participants, $250 for each addiitonal participant plus instructor travel and lodging expenses if applicable.
Please contact us for more information.
Course Instructor
Order Form
Semiconductor Services
2269 Chestnut St. #735
San Francisco, CA 94123
Tel:(650) 369-7890
Fax:(415) 346-8099
moreinfo@semiconductorservices.com