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This course develops the key concepts governing the behavior of glow discharge
plasmas, starting with the basic principles of molecular structure and electricity.
These concepts form the foundation of plasma processing technologies, such as etching,
sputtering, and plasma enhanced chemical vapor deposition. Topics include: electron
impact reactions, plasma density and structure, and ion bombardment. Semiconductor Services 2269 Chestnut St. #735 San Francisco, CA 94123 Tel:(650) 369-7890 Fax:(415) 346-8099 moreinfo@semiconductorservices.com |