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This course explains how plasma behavior differs in low frequency, radio frequency,
and microwave regimes. It also examines the consequences for electrical power coupling
and materials processing. Plasma behavior under alternating-current electrical excitation
is shown. Semiconductor Services 2269 Chestnut St. #735 San Francisco, CA 94123 Tel:(650) 369-7890 Fax:(415) 346-8099 moreinfo@semiconductorservices.com |